Any suggestion for DoE on chamber matching?
Hi, I have some questions about designing an effective DoE for chamber matching.Suppose that we have four identical chambers that share global factors "A" & "B", whereas Factor "C(n)" can be applied to each chamber.In other words, factors "A" & "B" will be applied to all four chambers at a time.Suppose that all Factors A&B&C have some 2nd order interactions, whilst dominant estimates come from Mai...