DOE
Hi,I have an interesting situation (at least to me) for a DOE. I need to design an experiment with 13 variables. Variable X1 and X2 (both numeric) cannot be in the experiment at the same time. If X2 is selected then the X2*X3 <= 1200. Furthermore, the ratio of X6 to X5 must be a whole number.The goal of the experiment is to improve wafer uniformity as measured by etch depth across the diameter of ...