I must apologize, and please do not be offended, but why would you want normal plots for a nested sampling plan? One of the most important aspect of such a plan is the rational series in which the data was acquired (e.g., time). When you put it on a normal plot, you lose the series. Now I think normal plots for DOE analysis are fantastic, but the time series in DOE is secondary to the factor effects.
“Analysis of variance, t-test, confidence intervals, and other statistical techniques taught in the books, however interesting, are inappropriate because they provide no basis for prediction and because they bury the information contained in the order of production. Most if not all computer packages for analysis of data, as they are called, provide flagrant examples of inefficiency.” Deming, W. Edwards (1975), On Probability As a Basis For Action. The American Statistician, 29(4), 1975, p. 146-152
Use variability chart, control charts (Range to assess the test structure consistency and Xbar to compare the test structure variation to the Wafer ID. Is the test structure within wafer consistent and if so which source is greater: the test structure or the wafer-to-wafer variation). and nested components of variation for quantitative (which you can get using the variability chart (options Variance Components).
"All models are wrong, some are useful" G.E.P. Box