Pinpointing and Reducing Defects

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See how to:

• Reduce spatial defect data to a few key clusters
• Correlate clusters and isolated defects to the manufacturing process in order to give direction for process improvements

See how to:

• Examine multildimensional defects by going from a 2D to a 3D view of the defect
• Visually explore 3D views using Scatterplot 3D

 Resources

• Clustering videos
• Multivariate analysis and clustering videos
• Background on Hough Transform feature extraction technique
• JMP Semiconductor Tool Kit Add-In for creating wafer maps
• Discovery Summit Video: All Wafer Maps Are Wrong: An Adventure in Semiconductor Data Visualization