Designing Process Optimization Experiments Using Models Based on Production Data

Do you have historical or real time production data? Have you wondered how to leverage these data to design high value, efficient, cost-effective experiments?

In this session, we will use the following steps to find an optimal process recipe for a plasma enhanced chemical vapor deposition (PECVD) tool that is used to deposit an insulative layer on a wafer in semiconductor manufacturing:

• Derive and refine a JMP Pro penalized regression model from production data combined with process and scientific knowledge.
• Use the regression model as a basis for an economical experiment design using the Design of Experiments (DOE) methodology.
• Find an optimal process recipe using a regression model of the experiment data.

 Suggested Prerequisites:

• Some experience evaluating process data.
• Basic familiarity with Design of Experiments and statistical models.