Thanks that worked great! Here's my code for the script version:
// JMP script to Eliminate duplicate rows "matching Parent, Wafer, & Raw Number"
dt3 = Current Data Table();
dt2 = dt3 << Summary(
Group( :Parent, :Meas Wafer Id, :Raw Number )
);
dt = dt3 << Join(
With( dt2 ),
Update,
By Matching Columns(
:Parent = :Parent,
:Meas Wafer Id = :Meas Wafer Id,
:Raw Number = :Raw Number
),
Drop multiples( 1, 0 ),
Name( "Include non-matches" )(0, 0),
Preserve main table order( 1 ),
);
Close(dt2, no save);
Close(dt3, no save);