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antonio-domenic

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Joined:

Feb 19, 2016

Multimodality distribution analysis

Multimodality distribution analysis

Discover variability sources hidden in density distributions by using JMP scripting capability

Abstract

In a semiconductor Fab several electrical measurements are collected on different silicon wafers.  Distributions associated to them typically are normal even though this is not always the case. Many  times those distributions show multiple modes because of processes shift,  tools  deviation or offset. The objective is to automatically identify the underlying multiple modes minimizing the noise

Authors

Antonio D. D'Angelo, Felice Russo

Company

Lfoundry s.r.l

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