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Apr 12, 2017

半导体工厂生产不同阶段的统计分析实践_许广勤_20170524

 演讲嘉宾:许广勤, SMIC,工艺整合资深经理

 Speaker: Guangqin Xu, Senior Process Integration Manager, SMIC
 

主题:半导体工厂不同生产阶段的统计分析实践

Topic: Statistical Practice During Different Production Phases in a Semiconductor Foundry

 

 

摘要:

在半导体产品的生产过程中不同的阶段有不同的工程侧重点,从而会引入相应不同的统计分析工具。在试产阶段,如何发现最佳的工艺条件和探索工艺窗口非常重要,实验设计(DOE)是一个非常有用的工具来帮助我们在有限的资源下获得期望的工艺条件,缩短工程周期。在批量生产过程中,我们更注重如何通过加强工艺控制来维护产品线的稳定以及早期失效侦测。统计工艺控制SPC经常被用来监控制程的状态,确定生产过程在管制的状态下,以降低产品品质的变异。而在大规模量产的过程中,产能扩充和产线稳定变得同样重要,全面的数据匹配是个重要的概念来保证在没有异常事件的情况做到快速的产能扩展。JMP可以在半导体产品生产的各个阶段统计分析中都可以扮演重要的角色。

 

Abstract:

In each phase of semiconductor product manufacturing, there are different engineering focuses. Therefore, different statistical tools are introduced. In the pilot phase, it is critical to find out the best process condition and explore the process window. Design of experiments (DOE) is a handy tool to achieve the desired process conditions with limited resources and a shortened cycle time. In risk production, strict process control ensures process stability and early failure detection. Statistical Process Control (SPC) tools are widely involved to monitor process performance, ensure the process is under control and reduce quality variation. In the mass production phase, capacity extension is just as important as process stability, and full data matching is a key mindset to ensure quick extension without excursion. JMP can play a key statistical role throughout the whole life of a semiconductor product.

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