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gail_massari

Community Manager

Joined:

Feb 27, 2013

Rapid Thermal Process DOE and Simulation

Rapid Thermal Process DOE and Simulation

Jeff Hebert jeffrey.hebert

Texas Instruments


After modeling complex RTP interactions we concluded that the current system was sub-optimal, the tool internal feedback works, and the external feedback loop was the problem.  Therefore, we had no need to completely change the system, but could fine-tune the feedback loop.  We overcame challenges using and communicating models, converging on an actionable model that took into account the characteristics of the processing equipment in use.