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## Rapid Thermal Process DOE and Simulation

Rapid Thermal Process DOE and Simulation

Jeff Hebert jeffrey.hebert

Texas Instruments

After modeling complex RTP interactions we concluded that the current system was sub-optimal, the tool internal feedback works, and the external feedback loop was the problem.  Therefore, we had no need to completely change the system, but could fine-tune the feedback loop.  We overcame challenges using and communicating models, converging on an actionable model that took into account the characteristics of the processing equipment in use.

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