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Level IV

Parametric Sensitivity Analysis


Gianpaolo Polsinelli




In a Silicon-Fab several electrical and functional measurements are collected for each single silicon wafer.

So it is very important to identify in a big mass of data which variables are really modulating the wafer yield the most important key performance indicator.  Usually a scatter plot with a linear regression fit is used for that.

Anyway this technique works well only if distributions are normal, in absence of outliers and data noisy. All those factors can obscure the true’s relationship between yield loss and in line issues.