Time Flies: Querying and Exploring Large Time-Dependent Data Sets (2026-US-30MP-2969)
Defectivity reduction efforts drive large-scale investigations of historical process data in photoresist manufacturing. For production engineers at Inpria, this data is stored as time series data on an SQL database. Data is recorded from equipment sensors every two seconds. As a result, large-scale investigations of new data metrics are time-consuming and present serious data integrity challenges. ...
Skill level:
beginner