In today’s highly comprehensive and competitive process and marketing landscape, measurement capability is critical to continuously improve process performance. Most optical metrology tools hit the limitations of measuring the images precisely and processing imaging analysis reliably. To minimize the undesired human-dependent errors, this presentation introduces JMP's systematic MSA workflow/scorecard methodology to guide stakeholders as they evaluate measurement capability and conduct the root cause analysis.
This innovative MSA workflow includes eight critical steps:
- Scope and objective
- Design MSA
- Design diagnostics
- Data collection plan
- Model type/algorithm
- Data analysis
- Root cause analysis
- Continuous mprovement
A scorecard has been created to monitor the effectiveness of each step through objective evidence. The JMP platforms used in the workflow include manage spec limits, tolerance interval, MSA, capability potential graph. This methodology carefully examines each of the eight steps to minimize the human factors by providing the appropriate JMP tools and then by grading the scorecard accordingly and collectively.
If the score for any workflow step is below the threshold, the MSA study is put on hold to investigate the risk, conduct the gap analysis, and take necessary actions immediately. To establish this MSA workflow/scorecard system effectively, a comprehensive JMP MSA training curriculum has been developed to train JMP MSA leaders and SMEs to deploy this modern MSA approach. Without building such an interdisciplinary MSA workflow/scorecard system, most optical metrology tools are not capable of meeting today’s technology roadmap.
Presenter
Schedule
4:30-5:15 PM
Location: Ped 5
Skill level
- Beginner
- Intermediate
- Advanced