Semiconductor factory capacity modeling involves maintenance of throughput values (as parts per hour [PPH]) for thousands of process recipes. Processing data is stored for each run, providing a rich pool of historical data that can be used to determine PPH values. In capacity modeling, inefficiencies that degrade capacity are isolated from throughput, so modeled PPH should represent the highest capable performance under continuous operation. These requirements complicate the process of sifting through historical data and special care is needed by process experts to identify non-steady-state runs that should be excluded from the analysis.

Using JSL, an interactive tool was created to assist in analysis of historical throughput data to evaluate, select, and document PPHs by recipe for use in capacity modeling. The script constructs a fully interactive, self-contained dashboard application that utilizes JSL-enhanced platforms and custom controls to assist in exploring sources of variation and isolation of steady-state runs. PPH value selection is made and documented directly in the dashboard, and finally, a summary of the selected values and distributions can be exported to PowerPoint for a complete analysis report.

This presentation includes a demonstration of the dashboard tool and walks through parts of the script.