Precision by Design: Applying DOE and MSA to Engineer Robust Measurement Systems (2026-EU-30MP-2631)

This talk focuses on enhancing precision in metrology experiments through structured methodologies and robust validation of measurement systems. It introduces KLA’s role in the electronics ecosystem, showcasing its core competencies in illumination sources, optics, sensors, mechanics, physical sciences, and image and data processing.

A central theme is the strategic use of design of experiments (DOE) to identify optimal working points for specific system designs. By exploring factorial designs, randomization, replication, and predictive modeling, DOE enables a deep understanding of how multiple input variables influence performance. Once a promising design is identified, measurement systems analysis (MSA) is applied to validate its reliability – assessing repeatability, reproducibility, bias, and linearity.

The presentation also covers engineering accuracy, custom DOE initialization, simulation results, process screening, and modeling of measurement system variability. Insights from the evaluating the measurement process (EMP) methodology confirm the robustness of the optimized setup and its high capability to detect process shifts. Ultimately, the talk demonstrates how combining DOE and MSA provides a powerful framework for selecting and validating the best design when developing new systems.