Multimodality distribution analysis
Discover variability sources hidden in density distributions by using JMP scripting capability
Abstract
In a semiconductor Fab several electrical measurements are collected on different silicon wafers. Distributions associated to them typically are normal even though this is not always the case. Many times those distributions show multiple modes because of processes shift, tools deviation or offset. The objective is to automatically identify the underlying multiple modes minimizing the noise
Authors
Antonio D. D'Angelo, Felice Russo
Company
Lfoundry s.r.l
