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Level IV

## How to create stable wafer maps indicating the flat

Hi,

I am triying to create a wafer map and indicate the position of the flat.

I managed to create the map but using the function "Path" to create the wafer borders was not successful...So I tried to use the function "Circle" and cut it where the flat should be.

The outcome is shown in the right picture below.

There 2 instabilities:

1/ the circle seems to scale differently from the window itself !

2/ When I try to save the picture using the "save picture" function, the wafer borders shift (see left picture below) !

My questions:

1/ Is there a way to have the wafer border including the flat in a simple and stable way when saving the picture ?

2/ Is it also possible to have it tied to the XCoord and Ycoord ? (meaning stable towards window scaling ?).

Please find attached the data table (ShotMap_Test.jmp) and the table needed to create the map (WaferMap.jmp).

Attached also the script I used (it is also attached to the data table)

```dt = Open( "ShotMap_Test.jmp" );

Biv = dt << Graph Builder(
Size( 511, 557 ),
Variables( X( :XCoord ), Y( :YCoord ), Color( :Value ) ),
Elements( Heatmap( X, Y, Legend( 5 ) ) ),
//Line({1,2}, {3,0}, {2,4});
SendToReport(
Dispatch(
{},
"XCoord",
ScaleBox,
{Min( -13 ), Max( 27 ), Inc( 1 ), Minor Ticks( 0 ), Show Major Grid( 1 ), Show Minor Grid( 1 ), Inside Ticks( 1 )}
),
Dispatch(
{},
"YCoord",
ScaleBox,
{Min( -6 ), Max( 70 ), Inc( 1 ), Minor Ticks( 0 ), Show Major Grid( 1 ), Show Minor Grid( 1 ), Inside Ticks( 1 )}
),
Dispatch(
{},
"400",
ScaleBox,
{Legend Model(
5,
Properties( 0, {gradient( {Color Theme( "Green Yellow Red" )} )} )
)}
)
)

);

WaferMap = Open( "WaferMap.jmp" );
nbrLines = N Rows( WaferMap );
nbrCols = N Cols( WaferMap );

Report( Biv )[Framebox( 1 )] << add graphics script(
For( n = 1, n <= nbrLines, n++,
Pen Size( WaferMap:Ythick[n] );
H Line( WaferMap:Xmin[n], WaferMap:Xmax[n], WaferMap:Y[n] );
)
);

Report( Biv )[Framebox( 1 )] << add graphics script(
For( n = 1, n <= nbrLines, n++,
Pen Size( WaferMap:Xthick[n] );
V Line( WaferMap:X[n], WaferMap:Ymin[n], WaferMap:Ymax[n] );
)
);

Report( Biv )[Framebox( 1 )] << add graphics script(
x1 = (Col Min( WaferMap:X ) + Col Max( WaferMap:X )) / 2;
y1 = (Col Min( WaferMap:Y ) + Col Max( WaferMap:Y )) / 2;
{r1, r2} = Report( Biv )[Framebox( 1 )] << Get Size();
radius = (r1 + r2) / 24
; Biv << reshow;
//Path( [0 65 1, -11 33 0, 0 0 0, 15 0 0, 25 0 0, 26 33 0, 10 0 -3], 0 );
//Path( [0 65 1, -11 33 0, 10 40 0, 8 0 0, 26 33 0, 10 0 -3], 0 );
Circle( {x1, y1}, radius/* no fill for concentric circles */ );

);

Report( Biv )[Picture Box( 1 )] << Save Picture( "ShotMap" || "_.emf", EMF );
Report( Biv )[Picture Box( 1 )] << Save Picture( "ShotMap" || "_.png", PNG );
Report( Biv )[Picture Box( 1 )] << Save Picture( "ShotMap" || "_.JPEG", JPEG );

//close(WaferMap, nosave);```
1 ACCEPTED SOLUTION

Accepted Solutions
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Staff

## Re: How to create stable wafer maps indicating the flat

Have a look at the annotate capability of the semiconductor toolkit.  Semiconductor Toolkit

If it's not doing what you need, add a comment to the toolkit thread and we can see what's missing.

Best,

M

3 REPLIES 3
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Level IV

Highlighted
Level IV

## Re: How to create stable wafer maps indicating the flat

The picture did not go through.

Find it attached.

Highlighted
Staff

## Re: How to create stable wafer maps indicating the flat

Have a look at the annotate capability of the semiconductor toolkit.  Semiconductor Toolkit

If it's not doing what you need, add a comment to the toolkit thread and we can see what's missing.

Best,

M

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