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带约束的实验设计方案及设计方法评估在PECVD BKM工艺开发及其预测模型建立中的应用_潘燕琦(Christy Pan)

演讲嘉宾:潘燕琦(Christy Pan), 应用材料公司工艺工程师

 

演讲主题:带约束的实验设计方案及设计方法评估在PECVD BKM工艺开发及其预测模型建立中的应用

 

摘要:

Comments

好东西 ! 就需要这样的精彩分享 !

Proud of Christy

 

Charles