In 2016, AlphaGo defeated the top Go players one by one. And in 2017, AlphaGo Zero beat all its predecessors through self-learning without human experience. Since then, humans entered the first year of AI. With the continuous development of information technology, the application of data, especially the application of big data in industry, plays an increasingly important role in the manufacturing industry. Integrated circuit (IC) manufacturing is a high-tech-intensive industry. The products’ very small dimensions and high-precision requirements are doomed to have a very close relationship with data analysis. This talk mainly introduces how to use the real-time equipment monitoring data in IC production to find the root cause of defects with data mining and machine learning methods to achieve quality improvement, cost reduction and productivity enhancement. Let’s see the powers and prospects of AI in the industry. We’ll share some actual cases to introduce how to use the model predictive function of JMP in defect prediction and virtual metrology of WAT based on IC manufacturing data. We hope that these cases will inspire.