Rapid Thermal Process DOE and Simulation
Jeff Hebert jeffrey.hebert
Texas Instruments
After modeling complex RTP interactions we concluded that the current system was sub-optimal, the tool internal feedback works, and the external feedback loop was the problem. Therefore, we had no need to completely change the system, but could fine-tune the feedback loop. We overcame challenges using and communicating models, converging on an actionable model that took into account the characteristics of the processing equipment in use.
