topic Re: How to get process parameter yield by wafer in a lot? in Discussions

How to get process parameter yield by wafer in a lot?

Neo — Tue, 16 Jul 2024 16:01:05 GMT

I want to get process parameter yield per "Wafer ID in lot ID" from the sample data table "Semiconductor Capability.jmp".

However, I am not able to proceed as I am getting an error: "Process Screening requires at least 7 rows of data."

Names Default To Here (1);
clear log ();
dt = Open("$SAMPLE_DATA/Semiconductor Capability.jmp");

col_names = dt << Get Column Group("Processes"); 
ps = dt << Process Screening (Process Variables( Eval( col_names )),  
                  Spec Limits Dialog( "No (skip columns with no spec limits)" ), 
                  Control Chart Type ("Indiv and MR"),
                  By( :wafer );// Just to demonstrate	
                  //By (:"Wafer ID in lot ID");I need this but this throws error in JMP 16.2.0 (Error: Process Screening requires at least 7 rows of data.). Why?
                  );

Where am I going wrong?

Once the above script works for By: Wafer ID in lot ID, I would like to get a data table (Summary?) in the form

Column1: Wafer ID in lot ID

Column2: Process names

Column3:

Process parameter yield = 100* # passing sites (per parameter which the above script gives, I think (5 - "out of spec count"))/ # sites measured per "Wafer ID in Lot ID"

(5 sites measured per wafer in this example data case)

How to do this via JSL?

Re: How to get process parameter yield by wafer in a lot?

jthi — Tue, 16 Jul 2024 16:19:51 GMT

Have you tried using Group instead of By for could grouping column?

Re: How to get process parameter yield by wafer in a lot?

Neo — Tue, 16 Jul 2024 16:48:29 GMT

@jthi yes, I did try Grouping by "Wafer ID in lot ID", which gives me a table with the required data, but I have not been able to extract the parameter yield I want from it. I am thinking of using the Summarize function but am not yet sure how to use it. Any help would be very useful.

Re: How to get process parameter yield by wafer in a lot?

jthi — Tue, 16 Jul 2024 16:57:40 GMT

I'm not sure what you wish to use the Summarize for? You can very easily get a table like this from Process Screening and then you just add one formula and you should get what you need (or maybe I'm missing something)

Re: How to get process parameter yield by wafer in a lot?

jthi — Wed, 17 Jul 2024 11:20:53 GMT

As this has been marked solved, I will also provide at least some sort of a final solution

Names Default To Here(1);
dt = Open("$SAMPLE_DATA/Semiconductor Capability.jmp");

ps = dt << Process Screening(
	Process Variables(Column Group("Processes")),
	Grouping(:Wafer ID in lot ID),
	Control Chart Type("Indiv and MR"),
	Within Sigma(0),
	Overall Sigma(0),
	Stability Index(0),
	Mean(0),
	Show Tests(0),
	Test 1(0),
	Out of Spec Rate(0),
	Latest Out of Spec(0),
	Cpk(0),
	Ppk(0)
);

dt_result = Report(ps)[Outline Box("Process Screening"), Table Box(1)] << Make Into Data Table;
ps << close window;
wait(0);

new_col = dt_result << New Column("Yield", Numeric, Continuous, Format("Percent", 12, 3), Formula(
	(:Count - :"Out of Spec Count"n) / :Count)
);
dt_result << run formulas;
new_col << delete formula;