entity,ceid,spc_operation_1,lot,lot7,runkey,action_date,spc_operation,action_date_1,lot_1,lot7_1,CE_PARTICLE,LARGE_PARTICLE,PATTERNED_PARTICLE,SCRATCH,SMALL_PARTICLE,action_date_2
PLI179,PLIpg,163476,N0326250,N032625,202040.881829889,2020-09-30 01:54:19,112573,2020-09-30 07:20:16,N0326250,N032625,0,0,0,0,0,2020-09-30 07:20:16
PLI191,PLIpg,163476,N0332120,N033212,202040.881617199,2020-09-29 21:28:39,112573,2020-09-30 14:15:45,N0332120,N033212,0.046425,0,0,0,0.046425,2020-09-30 14:15:45
PLI178,PLIpg,163476,N0325270,N032527,202040.881466299,2020-09-29 17:12:14,112573,2020-09-30 08:42:50,N0325270,N032527,0.159101,0,0,0,0.03182,2020-09-30 08:42:50
PLI178,PLIpg,163476,N0342350,N034235,202040.881070719,2020-09-29 05:46:10,112573,2020-09-29 11:09:05,N0342350,N034235,0.046638,0,0,0,0.093276,2020-09-29 11:09:05
PLI179,PLIpg,163476,N035413A,N035413,202039.880021419,2020-09-25 13:08:02,112573,2020-09-25 01:52:34,N0354130,N035413,0.046425,0.046425,0.09285,0,0.046638,2020-09-25 01:52:34
PLI179,PLIpg,163476,N0342450,N034245,202039.879949879,2020-09-25 11:12:44,112573,2020-09-25 14:52:26,N0342450,N034245,0.046638,0,0,0,0,2020-09-25 14:52:26
PLI179,PLIpg,163476,N0326370,N032637,202039.879615659,2020-09-25 02:25:28,112573,2020-09-25 07:12:28,N0326370,N032637,0.046638,0,0,0.046425,0,2020-09-25 07:12:28
PLI191,PLIpg,163476,N0330430,N033043,202039.879488539,2020-09-24 23:09:05,112573,2020-09-25 03:19:39,N0330430,N033043,0,0,0,0,0,2020-09-25 03:19:39
PLI191,PLIpg,163476,N0354130,N035413,202039.879346669,2020-09-24 20:44:28,112573,2020-09-25 01:52:34,N0354130,N035413,0.046425,0.046425,0.09285,0,0.046638,2020-09-25 01:52:34
PLI191,PLIpg,163476,N0326490,N032649,202039.878934509,2020-09-24 10:17:14,112573,2020-09-24 22:28:58,N0326490,N032649,0,0,0,0,0,2020-09-24 22:28:58
PLI180,PLIpg,163476,N034245A,N034245,202039.878890779,2020-09-24 08:17:22,112573,2020-09-25 14:52:26,N0342450,N034245,0.046638,0,0,0,0,2020-09-25 14:52:26
PLI191,PLIpg,163476,N0325880,N032588,202039.878858439,2020-09-24 08:09:38,112573,2020-09-24 20:34:06,N0325880,N032588,0,0,0,0,0,2020-09-24 20:34:06
PLI178,PLIpg,163476,N0331510K,N033151,202039.878641829,2020-09-24 02:08:33,112573,2020-09-24 18:07:19,N0331510,N033151,0.046638,0,0,0,0.046425,2020-09-24 18:07:19
PLI178,PLIpg,163476,N0331510,N033151,202039.878640779,2020-09-24 01:56:50,112573,2020-09-24 18:07:19,N0331510,N033151,0.046638,0,0,0,0.046425,2020-09-24 18:07:19
PLI191,PLIpg,163476,N0326000,N032600,202039.878354749,2020-09-23 19:39:10,112573,2020-09-24 00:33:09,N0326000,N032600,0.046425,0,0,0,0.046638,2020-09-24 00:33:09
PLI191,PLIpg,163476,N0325500,N032550,202039.877822709,2020-09-23 06:04:27,112573,2020-09-23 13:03:41,N0325500,N032550,0.046638,0,0,0,0,2020-09-23 13:03:41
PLI191,PLIpg,163476,N0331480,N033148,202039.877523149,2020-09-22 22:35:20,112573,2020-09-23 04:37:35,N0331480,N033148,0.309501,0,0,0,0.103167,2020-09-23 04:37:35
PLI178,PLIpg,163476,N034235A,N034235,202039.877066059,2020-09-22 12:05:59,112573,2020-09-29 11:09:05,N0342350,N034235,0.046638,0,0,0,0.093276,2020-09-29 11:09:05
PLI178,PLIpg,163476,N033043A,N033043,202038.872812679,2020-09-18 04:45:38,112573,2020-09-25 03:19:39,N0330430,N033043,0,0,0,0,0,2020-09-25 03:19:39